EE 298U

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

• 2nd Semester AY 2024-2025
• 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Description

At the end of this course, students should be able to:

1. Understand fundamental principles of device microfabrication and technology
2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
4. Learn the fundamentals and applications of MEMS devices
5. Create a fabrication process plan from existing MEMS devices in the literature

References

• R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
• S. Senturia, Microsystem Design, Springer, 2004.
• W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
• K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.