EE 298U

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

• 2nd Semester AY 2024-2025
• 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Outcomes

At the end of this course, students should be able to:

1. Understand fundamental principles of device microfabrication and technology
2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
4. Learn the fundamentals and applications of MEMS devices
5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar	Lecture Module	Topic 1	Topic 2	Resources
Week 1 (01/20 - 01/24)	Module 1: Course Introduction	Lecture 0a: Course Introduction Lecture 0b: Cleanroom Orientation	Lecture 1: Introduction to Microfabrication
Week 2 (01/27 - 01/31)	Module 2: Cleaning and Oxidation	Lecture 2: Microfabrication and MEMS in UPD	Lecture 3a: Silicon Fabrication Lecture 3b: Cleaning Process	RCA Cleaning
Week 3 (02/03 - 02/07)	Module 3: Oxidation Process	Lecture 4: Oxidation Processes (Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)	Seatwork No. 1
Week 4 (02/10 - 02/14)	Module 4: Photolithography	Lecture 5: Photolithography Part 1	Lecture 6: Photolithography Part 2
Week 5 (02/17 - 02/21)	Module 5: Deposition Processes	Lecture 7: Wet Deposition Processes	Lecture 8: Dry Deposition Processes	MatE 197 Doping Lecture
Week 6 (02-24 - 02/28)	Module 5: Deposition Processes (continued)	HOLIDAY	Seatwork No. 2
Week 7 (03/03 - 03/07)	Module 6: Etching Processes	Lecture 9: Etching Processes	Seatwork No. 3
Week 8 (03/10 - 03/14)	Module 7: Characterization Processes	Lecture 10: Electrical Characterization	Lecture 11: Optical Characterization
Week 9 (03/17 - 03/21)	Module 8: Packaging and Assembly	Seatwork No. 4	Lecture 12: Packaging
Week 10 (03/24 - 03/28)	Module 8: Packaging and Assembly (continued)	Lecture 13: Assembly	Lecture 14: MUMPS and CMOS Processes
Week 11 (03/31 - 04/04)	Module 9: Introduction to MEMS	HOLIDAY	Lecture 15: Introduction to MEMS
Week 12 (04/07 - 04/11)	Module 10: Final Project	Lecture 16: Cantilevers in MEMS	Project Introduction
Week 13 (04/14 - 04/18)	Lenten Break
Weeks 14-16 (04/21 - 05/09)	Final Project Consultations
Finals Week (05/26 - 05/30)	Final Project Presentations

References

• R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
• S. Senturia, Microsystem Design, Springer, 2004.
• W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
• K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.