EE 298U

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

• 2nd Semester AY 2024-2025
• 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Description

At the end of this course, students should be able to:

1. Understand fundamental principles of device microfabrication and technology
2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
4. Learn the fundamentals and applications of MEMS devices
5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar	Lecture Module	Topic 1	Topic 2	Resources
Week 1 (01/20 - 01/24)		Lecture 0: Course Introduction	Lecture 1: Introduction to Microfabrication
Week 2 (01/27 - 01/31)		Lecture 2: Microfabrication and MEMS in UPD	Lecture 3: Cleaning Process
Week 3 (02/03 - 02/07)		Lecture 5: Oxidation Processes	Seatwork
Week 4 (02/10 - 02/14)		Lecture 5: Photolithography Part 1	Lecture 6: Photolithography Part 2
Week 5 (02/17 - 02/21)		Seatwork	Lecture 7: Wet Deposition Processes
Week 6 (02-24 - 02/28)		HOLIDAY	Lecture 8: Dry Deposition Processes
Week 7 (03/03 - 03/07)		Lecture 9: Etching Processes	Seatwork
Week 8 (03/10 - 03/14)		Lecture 10: Electrical Characterization	Lecture 11: Optical Characterization
Week 9 (03/17 - 03/21)		Seatwork	Lecture 12: Pacakaging
Week 10 (03/24 - 03/28)		Lecture 13: Assembly	Lecture 14: MUMPS and CMOS Processes
Week 11 (03/31 - 04/04)		Lecture 15: Fundamentals of MEMS	Lecture 16: Applications of MEMS	220-A11.1: Folded-cascode OTA noise analysis 220-A11.2: Folded-cascode OTA linear and non-linear settling
Week 12 (04/07 - 04/11)		/Lecture 14: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
Week 13 (04/14 - 04/18)	////Lenten Break
Weeks 14-16 (04/21 - 05/09)	////Final Project Consultations
Finals Week (05/26 - 05/30)	////Final Project Presentations

References

• R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
• S. Senturia, Microsystem Design, Springer, 2004.
• W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
• K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.