Difference between revisions of "EE 298U"
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Latest revision as of 20:31, 20 February 2025
ECE 197U / EE 298U Introduction to Microfabrication and MEMS
- 2nd Semester AY 2024-2025
- 3 units lecture, 1 unit laboratory
Course Description
ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses
Course Outcomes
At the end of this course, students should be able to:
- Understand fundamental principles of device microfabrication and technology
- Appreciate cleanroom operation, laboratory safety, and chemical handling principles
- Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
- Learn the fundamentals and applications of MEMS devices
- Create a fabrication process plan from existing MEMS devices in the literature
Lecture Schedule
| Calendar | Lecture Module | Topic 1 | Topic 2 | Resources |
|---|---|---|---|---|
| Week 1 (01/20 - 01/24) |
Module 1: Course Introduction |
Lecture 0a: Course Introduction |
||
| Week 2 (01/27 - 01/31) |
Module 2: Cleaning and Oxidation |
Lecture 3a: Silicon Fabrication |
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| Week 3 (02/03 - 02/07) |
Module 3: Oxidation Process |
Lecture 4: Oxidation Processes |
Seatwork No. 1 |
|
| Week 4 (02/10 - 02/14) |
Module 4: Photolithography |
|||
| Week 5 (02/17 - 02/21) |
Module 5: Deposition Processes |
Lecture 7: Wet Deposition Processes |
||
| Week 6 (02-24 - 02/28) |
Module 5: Deposition Processes (continued) |
HOLIDAY |
Seatwork No. 2 |
|
| Week 7 (03/03 - 03/07) |
Module 6: Etching Processes |
Lecture 8: Etching Processes |
Seatwork No. 3 |
|
| Week 8 (03/10 - 03/14) |
Module 7: Characterization Processes |
Lecture 10: Electrical Characterization |
Lecture 11: Optical Characterization |
|
| Week 9 (03/17 - 03/21) |
Module 8: Packaging and Assembly |
Seatwork No. 4 |
Lecture 12: Pacakaging |
|
| Week 10 (03/24 - 03/28) |
Module 8: Packaging and Assembly (continued) |
Lecture 13: Assembly |
Lecture 14: MUMPS and CMOS Processes |
|
| Week 11 (03/31 - 04/04) |
Module 9: Introduction to MEMS |
Lecture 15: Fundamentals of MEMS |
Lecture 16: Applications of MEMS |
|
| Week 12 (04/07 - 04/11) |
Module 10: Final Project |
Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process |
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| Week 13 (04/14 - 04/18) |
Lenten Break |
|||
| Weeks 14-16 (04/21 - 05/09) |
Final Project Consultations |
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| Finals Week (05/26 - 05/30) |
Final Project Presentations |
References
- R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
- S. Senturia, Microsystem Design, Springer, 2004.
- W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
- K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.
