Difference between revisions of "EE 298U"

From Microlab Classes
Jump to navigation Jump to search
 
(10 intermediate revisions by the same user not shown)
Line 25: Line 25:
 
| style="text-align:center;" | Week 1 (01/20 - 01/24)
 
| style="text-align:center;" | Week 1 (01/20 - 01/24)
 
|  
 
|  
−
[[Module 1: Course Introduction]]
+
'''Module 1: Course Introduction'''
 
|  
 
|  
−
Lecture 0: Course Introduction
+
[https://drive.google.com/file/d/15lgRKbLNgP7yvEsZKrMGsaezMWHq2uDk/view?usp=sharing Lecture 0a: Course Introduction]<br>
 +
[https://drive.google.com/file/d/1zhmHOs3rIS02LsWwTGwx2wIoYWHHEQ5A/view?usp=drive_link Lecture 0b: Cleanroom Orientation]
 
|  
 
|  
−
Lecture 1: Introduction to Microfabrication
+
[https://drive.google.com/file/d/1ZLKizDyjc2tkmXTSxLbwwIRgT1DbXERD/view?usp=sharing Lecture 1: Introduction to Microfabrication]
 
|
 
|
 
|-
 
|-
 
| style="text-align:center;" | Week 2 (01/27 - 01/31)
 
| style="text-align:center;" | Week 2 (01/27 - 01/31)
 
|  
 
|  
−
[[Module 2: Cleaning and Oxidation]]
+
'''Module 2: Cleaning and Oxidation'''
 
|  
 
|  
−
Lecture 2: Microfabrication and MEMS in UPD
+
[https://drive.google.com/file/d/13gkETbiL3nfEkCFypy2ASMZHkJwTG11v/view?usp=drive_link Lecture 2: Microfabrication and MEMS in UPD]
 
|
 
|
−
Lecture 3: Cleaning Process
+
[https://drive.google.com/file/d/1ztZ_l3BtWUG9EsoNeXN6CtK1OBDHGD44/view?usp=drive_link Lecture 3a: Silicon Fabrication]<br>
 +
[https://drive.google.com/file/d/1TPqJx0rXsRCAldNX-0L8gzNb3GIJfqcC/view?usp=drive_link Lecture 3b: Cleaning Process]
 
|
 
|
 +
[https://drive.google.com/file/d/1gcqnuWbfJG2JjJab8fkXzcvAQFVx1A-q/view?usp=drive_link RCA Cleaning]
 
|-
 
|-
 
| style="text-align:center;" | Week 3 (02/03 - 02/07)
 
| style="text-align:center;" | Week 3 (02/03 - 02/07)
 
|  
 
|  
−
[[Module 3: Oxidation Process]]
+
'''Module 3: Oxidation Process'''
 
|  
 
|  
−
Lecture 5: Oxidation Processes
+
Lecture 4: Oxidation Processes <br>
 +
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)
 
|
 
|
 
Seatwork
 
Seatwork
Line 52: Line 56:
 
| style="text-align:center;" | Week 4 (02/10 - 02/14)
 
| style="text-align:center;" | Week 4 (02/10 - 02/14)
 
|  
 
|  
−
[[Module 4: Photolithography]]
+
'''Module 4: Photolithography'''
 
|  
 
|  
 
Lecture 5: Photolithography Part 1
 
Lecture 5: Photolithography Part 1
Line 61: Line 65:
 
| style="text-align:center;" | Week 5 (02/17 - 02/21)
 
| style="text-align:center;" | Week 5 (02/17 - 02/21)
 
|  
 
|  
−
[[Module 5: Deposition Processes]]
+
'''Module 5: Deposition Processes'''
 
|  
 
|  
 
Seatwork
 
Seatwork
Line 70: Line 74:
 
| style="text-align:center;" | Week 6 (02-24 - 02/28)
 
| style="text-align:center;" | Week 6 (02-24 - 02/28)
 
|  
 
|  
−
[[Module 5: Deposition Processes (continued)]]
+
'''Module 5: Deposition Processes (continued)'''
 
|  
 
|  
 
HOLIDAY
 
HOLIDAY
Line 79: Line 83:
 
| style="text-align:center;" | Week 7 (03/03 - 03/07)
 
| style="text-align:center;" | Week 7 (03/03 - 03/07)
 
|  
 
|  
−
[[Module 6: Etching Processes]]
+
'''Module 6: Etching Processes'''
 
|
 
|
 
Lecture 9: Etching Processes
 
Lecture 9: Etching Processes
Line 88: Line 92:
 
| style="text-align:center;" | Week 8 (03/10 - 03/14)
 
| style="text-align:center;" | Week 8 (03/10 - 03/14)
 
|  
 
|  
−
[[Module 7: Characterization Processes]]
+
'''Module 7: Characterization Processes'''
 
|  
 
|  
 
Lecture 10: Electrical Characterization
 
Lecture 10: Electrical Characterization
Line 97: Line 101:
 
| style="text-align:center;" | Week 9 (03/17 - 03/21)
 
| style="text-align:center;" | Week 9 (03/17 - 03/21)
 
|  
 
|  
−
[[Module 8: Packaging and Assembly]]
+
'''Module 8: Packaging and Assembly'''
 
|  
 
|  
 
Seatwork
 
Seatwork
Line 106: Line 110:
 
| style="text-align:center;" | Week 10 (03/24 - 03/28)
 
| style="text-align:center;" | Week 10 (03/24 - 03/28)
 
|  
 
|  
−
[[Module 8: Packaging and Assembly (continued)]]
+
'''Module 8: Packaging and Assembly (continued)'''
 
|  
 
|  
 
Lecture 13: Assembly
 
Lecture 13: Assembly
Line 115: Line 119:
 
| style="text-align:center;" | Week 11 (03/31 - 04/04)
 
| style="text-align:center;" | Week 11 (03/31 - 04/04)
 
|  
 
|  
−
[[Module 9: Introduction to MEMS]]
+
'''Module 9: Introduction to MEMS'''
 
|  
 
|  
 
Lecture 15: Fundamentals of MEMS
 
Lecture 15: Fundamentals of MEMS
Line 121: Line 125:
 
Lecture 16: Applications of MEMS
 
Lecture 16: Applications of MEMS
 
|
 
|
−
* [[220-A11.1]]: Folded-cascode OTA noise analysis
 
−
* [[220-A11.2]]: Folded-cascode OTA linear and non-linear settling
 
 
|-
 
|-
 
| style="text-align:center;" | Week 12 (04/07 - 04/11)
 
| style="text-align:center;" | Week 12 (04/07 - 04/11)
 
|  
 
|  
−
[[Module 10: Final Project]]
+
'''Module 10: Final Project'''
 
|  
 
|  
−
/Lecture 14: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
+
Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
 +
|
 
|
 
|
 
|-
 
|-
 
| style="text-align:center;" | Week 13 (04/14 - 04/18)
 
| style="text-align:center;" | Week 13 (04/14 - 04/18)
 
|  
 
|  
−
////[[Lenten Break]]
+
'''Lenten Break'''
 +
|
 +
|
 +
|
 
|-
 
|-
 
| style="text-align:center;" | Weeks 14-16 (04/21 - 05/09)
 
| style="text-align:center;" | Weeks 14-16 (04/21 - 05/09)
 
|  
 
|  
−
////[[Final Project Consultations]]
+
'''Final Project Consultations'''
 +
|
 +
|
 +
|
 
|-
 
|-
 
| style="text-align:center;" | Finals Week (05/26 - 05/30)
 
| style="text-align:center;" | Finals Week (05/26 - 05/30)
 
|  
 
|  
−
////[[Final Project Presentations]]
+
'''Final Project Presentations'''
 +
|
 +
|
 +
|
 
|-
 
|-
 
|}
 
|}

Latest revision as of 15:14, 4 February 2025

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

  • 2nd Semester AY 2024-2025
  • 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Description

At the end of this course, students should be able to:

  1. Understand fundamental principles of device microfabrication and technology
  2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
  3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
  4. Learn the fundamentals and applications of MEMS devices
  5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar Lecture Module Topic 1 Topic 2 Resources
Week 1 (01/20 - 01/24)

Module 1: Course Introduction

Lecture 0a: Course Introduction
Lecture 0b: Cleanroom Orientation

Lecture 1: Introduction to Microfabrication

Week 2 (01/27 - 01/31)

Module 2: Cleaning and Oxidation

Lecture 2: Microfabrication and MEMS in UPD

Lecture 3a: Silicon Fabrication
Lecture 3b: Cleaning Process

RCA Cleaning

Week 3 (02/03 - 02/07)

Module 3: Oxidation Process

Lecture 4: Oxidation Processes
(Guest Lecture: UPD DMMME Asst. Prof. Rogel Butalid)

Seatwork

Week 4 (02/10 - 02/14)

Module 4: Photolithography

Lecture 5: Photolithography Part 1

Lecture 6: Photolithography Part 2

Week 5 (02/17 - 02/21)

Module 5: Deposition Processes

Seatwork

Lecture 7: Wet Deposition Processes

Week 6 (02-24 - 02/28)

Module 5: Deposition Processes (continued)

HOLIDAY

Lecture 8: Dry Deposition Processes

Week 7 (03/03 - 03/07)

Module 6: Etching Processes

Lecture 9: Etching Processes

Seatwork

Week 8 (03/10 - 03/14)

Module 7: Characterization Processes

Lecture 10: Electrical Characterization

Lecture 11: Optical Characterization

Week 9 (03/17 - 03/21)

Module 8: Packaging and Assembly

Seatwork

Lecture 12: Pacakaging

Week 10 (03/24 - 03/28)

Module 8: Packaging and Assembly (continued)

Lecture 13: Assembly

Lecture 14: MUMPS and CMOS Processes

Week 11 (03/31 - 04/04)

Module 9: Introduction to MEMS

Lecture 15: Fundamentals of MEMS

Lecture 16: Applications of MEMS

Week 12 (04/07 - 04/11)

Module 10: Final Project

Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process

Week 13 (04/14 - 04/18)

Lenten Break

Weeks 14-16 (04/21 - 05/09)

Final Project Consultations

Finals Week (05/26 - 05/30)

Final Project Presentations

References

  • R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
  • S. Senturia, Microsystem Design, Springer, 2004.
  • W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
  • K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.
Retrieved from "https://classes.up-microlab.org/index.php?title=EE_298U&oldid=4407"