Difference between revisions of "EE 298U"

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'''EE 298U Introduction to Microfabrication and MEMS'''
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'''ECE 197U / EE 298U Introduction to Microfabrication and MEMS'''
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* 2 units lecture, 1 unit laboratory
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* 2nd Semester AY 2024-2025
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* 3 units lecture, 1 unit laboratory
 +
 
 +
== Course Description ==
 +
ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses
 +
 
 +
== Course Description ==
 +
At the end of this course, students should be able to:
 +
# Understand fundamental principles of device microfabrication and technology
 +
# Appreciate cleanroom operation, laboratory safety, and chemical handling principles
 +
# Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
 +
# Learn the fundamentals and applications of MEMS devices
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# Create a fabrication process plan from existing MEMS devices in the literature
 +
 
 +
== Lecture Schedule ==
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{| class="wikitable"
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|-
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! scope="col"| Calendar
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! scope="col"| Lecture Module
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! scope="col"| Topic 1
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! scope="col"| Topic 2
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! scope="col"| Resources
 +
|-
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| style="text-align:center;" | Week 1 (01/20 - 01/24)
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|
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'''Module 1: Course Introduction'''
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|
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Lecture 0: Course Introduction
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|
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Lecture 1: Introduction to Microfabrication
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|
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|-
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| style="text-align:center;" | Week 2 (01/27 - 01/31)
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|
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'''Module 2: Cleaning and Oxidation'''
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|
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Lecture 2: Microfabrication and MEMS in UPD
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|
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Lecture 3: Cleaning Process
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|
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|-
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| style="text-align:center;" | Week 3 (02/03 - 02/07)
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|
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'''Module 3: Oxidation Process'''
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|
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Lecture 5: Oxidation Processes
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|
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Seatwork
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|
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|-
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| style="text-align:center;" | Week 4 (02/10 - 02/14)
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|
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'''Module 4: Photolithography'''
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|
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Lecture 5: Photolithography Part 1
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|
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Lecture 6: Photolithography Part 2
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|
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|-
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| style="text-align:center;" | Week 5 (02/17 - 02/21)
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|
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'''Module 5: Deposition Processes'''
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|
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Seatwork
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|
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Lecture 7: Wet Deposition Processes
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|
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|-
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| style="text-align:center;" | Week 6 (02-24 - 02/28)
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|
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'''Module 5: Deposition Processes (continued)'''
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|
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HOLIDAY
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|
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Lecture 8: Dry Deposition Processes
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|
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|-
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| style="text-align:center;" | Week 7 (03/03 - 03/07)
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|
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'''Module 6: Etching Processes'''
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|
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Lecture 9: Etching Processes
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|
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Seatwork
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|
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|-
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| style="text-align:center;" | Week 8 (03/10 - 03/14)
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|
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'''Module 7: Characterization Processes'''
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|
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Lecture 10: Electrical Characterization
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|
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Lecture 11: Optical Characterization
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|
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|-
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| style="text-align:center;" | Week 9 (03/17 - 03/21)
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|
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'''Module 8: Packaging and Assembly'''
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|
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Seatwork
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|
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Lecture 12: Pacakaging
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|
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|-
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| style="text-align:center;" | Week 10 (03/24 - 03/28)
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|
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'''Module 8: Packaging and Assembly (continued)'''
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|
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Lecture 13: Assembly
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|
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Lecture 14: MUMPS and CMOS Processes
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|
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|-
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| style="text-align:center;" | Week 11 (03/31 - 04/04)
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|
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'''Module 9: Introduction to MEMS'''
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|
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Lecture 15: Fundamentals of MEMS
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|
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Lecture 16: Applications of MEMS
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|
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|-
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| style="text-align:center;" | Week 12 (04/07 - 04/11)
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|
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'''Module 10: Final Project'''
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|
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Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process
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|
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|
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|-
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| style="text-align:center;" | Week 13 (04/14 - 04/18)
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|
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'''Lenten Break'''
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|
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|
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|
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|-
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| style="text-align:center;" | Weeks 14-16 (04/21 - 05/09)
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|
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'''Final Project Consultations'''
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|
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|
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|
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|-
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| style="text-align:center;" | Finals Week (05/26 - 05/30)
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|
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'''Final Project Presentations'''
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|
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|
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|
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|-
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|}
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== References ==
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* R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
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* S. Senturia, Microsystem Design, Springer, 2004.
 +
* W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
 +
* K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.

Latest revision as of 10:00, 30 January 2025

ECE 197U / EE 298U Introduction to Microfabrication and MEMS

  • 2nd Semester AY 2024-2025
  • 3 units lecture, 1 unit laboratory

Course Description

ECE 197U / EE 298U is designed to introduce students to the fundamentals of microfabrication and its applications in integrated circuits (ICs) and microelectromechanical systems (MEMS). The lectures discuss the theories behind standard microfabrication processes. The laboratory class then demonstrates these theories through hands-on experiments using actual microfabrication materials and equipment. Pre-req: Must have taken EEE 41 (Introduction to Semiconductor Devices and Circuits) or EEE 131 (Electronic Devices and Circuits) or equivalent courses

Course Description

At the end of this course, students should be able to:

  1. Understand fundamental principles of device microfabrication and technology
  2. Appreciate cleanroom operation, laboratory safety, and chemical handling principles
  3. Learn the basics of the operation of fabrication equipment in the UP Diliman Microfabrication Facility
  4. Learn the fundamentals and applications of MEMS devices
  5. Create a fabrication process plan from existing MEMS devices in the literature

Lecture Schedule

Calendar Lecture Module Topic 1 Topic 2 Resources
Week 1 (01/20 - 01/24)

Module 1: Course Introduction

Lecture 0: Course Introduction

Lecture 1: Introduction to Microfabrication

Week 2 (01/27 - 01/31)

Module 2: Cleaning and Oxidation

Lecture 2: Microfabrication and MEMS in UPD

Lecture 3: Cleaning Process

Week 3 (02/03 - 02/07)

Module 3: Oxidation Process

Lecture 5: Oxidation Processes

Seatwork

Week 4 (02/10 - 02/14)

Module 4: Photolithography

Lecture 5: Photolithography Part 1

Lecture 6: Photolithography Part 2

Week 5 (02/17 - 02/21)

Module 5: Deposition Processes

Seatwork

Lecture 7: Wet Deposition Processes

Week 6 (02-24 - 02/28)

Module 5: Deposition Processes (continued)

HOLIDAY

Lecture 8: Dry Deposition Processes

Week 7 (03/03 - 03/07)

Module 6: Etching Processes

Lecture 9: Etching Processes

Seatwork

Week 8 (03/10 - 03/14)

Module 7: Characterization Processes

Lecture 10: Electrical Characterization

Lecture 11: Optical Characterization

Week 9 (03/17 - 03/21)

Module 8: Packaging and Assembly

Seatwork

Lecture 12: Pacakaging

Week 10 (03/24 - 03/28)

Module 8: Packaging and Assembly (continued)

Lecture 13: Assembly

Lecture 14: MUMPS and CMOS Processes

Week 11 (03/31 - 04/04)

Module 9: Introduction to MEMS

Lecture 15: Fundamentals of MEMS

Lecture 16: Applications of MEMS

Week 12 (04/07 - 04/11)

Module 10: Final Project

Lecture 17: Synthesis of Fabrication Processes: The MUMPS Fabrication Process

Week 13 (04/14 - 04/18)

Lenten Break

Weeks 14-16 (04/21 - 05/09)

Final Project Consultations

Finals Week (05/26 - 05/30)

Final Project Presentations

References

  • R. Jaeger, Introduction to Microelectronic Fabrication, Prentice Hall, 2002.
  • S. Senturia, Microsystem Design, Springer, 2004.
  • W. Schomburg, Introduction to Microsystem Design, Springer, 2011.
  • K. Lee, Principles of Microelectromechanical Systems, Wiley-IEEE, 2011.
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